• création graphique
  • Scope of the Workshop

    This workshop is the 5th in a series devoted to plasma etch and strip processes for micro and nano- electronics. This year’s workshop also addresses new and challenging topics in the field of emerging nanoscale devices.

    The objective of the workshop is to provide a forum for open discussions between science and industrial application. It is dedicated to scientists, process engineers and Ph-D students.

    Topics include both fundamental and applied research, as well as issues related to introduction into manufacturing, with the progressive downscaling of device dimensions and the simultaneous demand for more functionality.

    Invited talks will be given by scientific and technical leaders in each of the key areas to present the current state-of-the-art and to stimulate technical discussions.

  • Key dates

    Final Announcement : October 21, 2011
    Abstracts are due : December 31, 2011
    Notification of authors : January 31, 2012
  • Previous Editions

  • For further information

    Registration Organization
    39 chemin du vieux chêne - 38240 Meylan
    Tel : +33 825 595 525 (0,15€/min*) - Fax : +33 4 38 38 18 19
    Email : pesm2012_registration@insight-outside.fr
    Website : http://www.insight-outside.fr

    Information desk
    monday to friday from 2:00pm to 5:00pm
    CNRS-LTM c/o CEA-Leti
    17 Rue des Martyrs
    38054 Grenoble Cedex

    Contact : Maxime DARNON
    Tel : +33 438 783 511
    Email : maxime.darnon@cea.fr


    (*) Prices starting from fixed line incumbent, a surcharge may be applied by operators, counting the second after the first 45 seconds.

    According to France's Personal Data Privacy Act in effect since June 2004, you may send a request in writing to INSIGHT OUTSIDE 39 chemin du vieux chêne, 38240 Meylan / France, or by email webmaster@insight-outside.fr to access your file in order to consult, modify and/or delete your personal information.

    © 2005 - 2011 Insight Outside